ESDtest report
工厂安全管理制度-植树节标语
09OEG32026 18
Test Report
To: KAHO
ELECTRONICS CO.,LTD
・This test report shows the
detailes of ESD test condition.
Order
number:S320-09-0005
【Summary】
Model
name:Crystal Oscillator IC KH9709
・It reports
on the ability value evaluation of various ESD
test.
1.Standards
compliant
・HBM
・MM
・FI-
CDM
:AEC-Q100-002 REV-D
:AEC-Q100-003
REV-E
:AEC-Q100-011 REV-B
2.Evaluation
result
(1)The judgment result by the IV
measurement of each terminal is shown.
・The
abnormal value was not observed.
PinName
Com
mon
terminal
VDD
VSS
IO-
IO
VDD
VSS
IO-IO
VDD
VSS
IO-
IO
VDD
VSS
IO-IO
Polarity
+-
+-<
br>+-
+-
+-
+-
+-
+-
+-
+-
+-
+-
HBM
1000V2000V
0303
0303
0303
0303
0303
0303
0303
0303
03
03
0303
0303
0303
Fail sizeSample size
MM
200V400V
0303
0303
0303
0303
0303
0303
0303
0303
0303
03030303
0303
XT
INHN
Q
XTN
500V03
03
03
03
03
03
03
03
03
03
03
03
4000V
03
03
03
03
03
03
03
03
03
03
03
0
3
50V
03
03
03
03
03
03
03
03
03
03
03
03
100V
03
03
03
03
03
03
03
03
03
0303
03
PinName
Polarity
XT
INHN
Q
XTN
+
-
+
-
+
-
+
-<
br>125V
03
03
03
03
03
03
03<
br>03
250V
03
03
03
03
03
03<
br>03
03
FI-CDM
500V
03
03
03
03
03
03
03
03
750V
03
03
03
03
03
03
03
03
1000V
0303
03
03
03
03
03
03
OKI
Engineering Co., Ltd
CONFIDENTIAL
09OEG32026
28
(2)The judgment result of the current
draw(Idd) measurement is shown.
・An increase
in leakage was seen in
HBM±1000V、±2000V、±4000V、FICDM-1000V.
・An
increase in leakage was not seen in MM.
Fail
sizeSample size
MM
4000V
03
33
0350V
03
03
03
100V
03
03
03<
br>200V
03
03
03
400V
03
03
0
3
PinName
Common
terminal
VDD
VSSIO-IO
polarity
+-
+-
+-
HBM
50
0V
03
03
03
1000V
33
03
03
2000V
03
33
03
VDD
PinNamepolarity
VDD
+
-
FI-CDM
125V
03
03
250V
03
03
500V
03
03
750V
0
3
03
1000V
03
13
(3)The HBM
addition measurement result is shown.
・To
confirm whether it was progress of the leakage
increase phenomenon of (2), Dependence by pulse
number,
temperature characteristic , high
temparature soak test was executed.
As a
result, the great increase in leakage was not
seen.
〈Pulse number test〉
Pulse
number1
3
5
7
10
#97
7.30E-08
2.0
5E-07
1.89E-07
1.74E-07
1.42E-07
Idd(A
)
#98
9.91E-11
5.45E-07
4.01E-07
3.
75E-07
3.44E-07
#99
1.12E-10
3.79E-07<
br>6.96E-07
6.78E-07
7.02E-07
〈Temperatur
e characteristic test〉
temp
85℃
Idd(A)
#97#98#99
7.71E-082.05E-074.63E-07
〈High
temperature soak test〉
temp
150℃
Idd(A)#97#98#99
2.88E-083.84E-081.28E-07
3.Concl
usions
About the current draw measurement,
increase of the leakage was confirmed after an
electric discharge in HBM, FI-CDM.
Whether this
is a defective mode dependence by pulse number
(leakage decrease by detrap phenomenon) ,
leakage after high temperature soak, and
leakage in high temperature (85℃) state are
confirmed from the idea
of the career trap
phenomenon by having discharged electricity to the
power supply terminal(VDD) is understood.
As a
result, the increase of Leake was not seen and it
is thought a leakage increase that accompanies
a substrate leakage increase by the career
trap etc. It is no problem even if it excludes it
from a defective
judgment in the place where
Leake is in the standard.
The results of
various ESD performance values are as follows.
Test model
HBM
MM
FI-CDM
Performan
ce
values
>4000V
>400V
>1000V
OKI
Engineering Co., Ltd
CONFIDENTIAL
09OEG32026
38
1Title
・ESD Test
・Model
name:
・Package:
Crystal Oscillator IC
KH9709
DIP8pin (HBMMM)、SMD7*5 LVPECL PKG
(FICDM)
2Device
3
【IV measurement and
Current draw measurement】
〈Test Method〉
Test
Method
・The IV measurement of XT, INHN, Q, and
XTN terminal before and after the electrical
discharge
and
is examined on the following
conditions.
Test condition
・Current draw
measurement is examined on the following
conditions.
〈Test condition〉
・Mesurement
temperature : Room temperature
VFIM
BIAS
PinName
condition
rangesteplimit
XT
IN
HN
Q
XTN
-1.0~7.0V
-1.0~1.0V
0.1V±1
.0mA
5.5V
5.5V
5.5V
-
Mesurement
condition
XT → Connect to VSS terminal
INHN
→ Connect to VSS terminal
Short-circuit in VDD
and VSS terminal
PinName
VDD
Idd
limit
10mA
Mesurement condition
XT→Connect to
VSS terminal
【Human Body
Model(Cd:100pF、Rd:1.5kΩ)】
〈Test Method〉
・The
IV of XT, INHN, Q, and XTN terminal and current
draw are mesureed before an electrical
discharge.
・About each method,each test voltage
is discharged to the testing terminal.
・The IV
of XT, INHN, Q, and XTN terminal and current draw
are mesureed after an electrical
discharge.
〈Test condition〉
・Standards
comliant
・Test voltage
・Polarity
・Test
temperature
・Test pins
・Puls
number
・Common terminal
・Sample size
Meth
ods
1
2
3
:
:
:
:
:
:<
br>:
:
AEC-Q100-002 REV-D is assumed to be
basic.
500V、1000V、2000V、4000V
Positive and
Negative
Room temperature
All pins
(Total:6pins)*Refer to pinTable described in
One times page 6 for details.
VDD、VSS、IO-
IO
It shows as follows.
Test voltage
50
0V
3
3
3
1000V
3
3
3
2000V
3
3
3
4000V
3
3
3
Common<
br>terminal
VDD
VSS
IO-
IO
Polarity
+-
+-
+-
【Machine
Model(Cd:200pF、Rd:0Ω)】
〈Test Method〉
・The IV
of XT, INHN, Q, and XTN terminal and current draw
are mesureed before an electrical
discharge.
・About each method,each voltage is
discharged to the testing terminal.
・The IV
of XT, INHN, Q, and XTN terminal and current draw
are mesureed after an electrical
discharge.
〈Test condition〉
・Standards
comliant
・Test voltage
・Polarity
・Test
temperature
・Test pins
・Puls
number
・Interval
・Common terminal
・Sample
size
Methods
1
2
3
:
:
:
:
:
:
:
:
:
AEC-Q100-003
REV-E is assumed to be basic.
50V、100V、200V、400V
Positive and Negative
Room temperature
All pins
(Total:6pins)*Refer to pinTable described in
3times page 6 for details.
1.0second
VDD、VSS、IO-IO
It shows as
follows.
50V
3
3
3
Test voltage
100V200V
33
33
33
400V
3
3
3
Common
terminal
VDD
VSS
IO-
IO
Polarity
+-
+-
+-
OKI
Engineering Co.,
Ltd
CONFIDENTIAL
09OEG32026
48
【Field-Induced Charged Device
Model】
〈Test Method〉
・The IV of XT, INHN,
Q, and XTN terminal and current draw are mesureed
before an electrical discharge.
Test
Method
・About each method,each voltage is
discharged to the testing terminal.
and
・The IV of XT, INHN, Q, and XTN
terminal and current draw are mesureed after an
electrical discharge.
Test condition
〈Test
condition〉
・Standards comliant
・Test
voltage
・Polarity
・Test temperature
・Test
pins
・Puls number
・Interval
・Sample size<
br>MethodsPolarity
1
2
+
-
:
::
:
:
:
:
:
AEC-Q100-011
REV-B is assumed to be basic.
125V、250V、500V、750V、1000V
Positive and
Negative
Room temperature
All pins
(Total:6pins)*Refer to pinTable described in
3times page 6 for details.
1.0second
It shows as follows.
Test vol
tage
250V500V750V
333
333
125V
3
3
1000V
3
3
【HBM addition
measurement】
①Pulse number test
〈Test
Method〉
・Chek for changes in current draw by
the pulse number.
〈Test
condition〉
・Standards comliant
・Test
voltage
・Polarity
・Test temperature
・Test
pins
・Puls number
・Interval
・Common
terminal
・Sample size
:
:
:
:
:
:
:
:
:
AEC-Q100-002 REV-D is
assumed to be basic.
1000V
Positive and
Negative
Room temperature
All pins
(Total:6pins)*Refer to pinTable described in
1、3、5、7、10times page 6 for details.
0.5seconds
VDD
3pieces
②Temperature
characteristic test
〈Test Method〉
・After an
electrical discharge test , using the same sample
, 85℃ in the measurement of current draw.
〈Test
condition〉
・Measurement
temperature:85℃
・Sample size:3pieces
③High
temperature soak test
〈Test Method〉
・After
temperature characterisitic test , using the same
sample , 150℃ in the measurement of
high
temperarure soak test.
〈Test
condition〉
・Measurement
temperature:150℃
・Soak time:24 hours
・Sample
size:3pieces
OKI Engineering Co.,
Ltd
CONFIDENTIAL
09OEG32026 58
【IV
measurement and current draw measurement result
before an electrical discharge】
・IV measurement
and the current measurement result before an
electrical discharge about a DIP8pin sample
(100pieces) and a sample (30pieces) for CDM
mention it in the initial characteristic data of
the attached sheet.
(The document number
refers to page 6.)
VF point
Pin
Name
・Measurement average+3σ and measurement
average+5σ in each
0V、5.5V
voltage point
are described to the initial characteristic data
of theXT、INHN、Q
-0.4V、0V、0.5V
attached
paper as a judging material of the judgment
standard. XTN
(The document number refers to
page 6.)
【HBM test result】
①IV measurement
result after an electrical discharge
・The
abnormal value regarded as destruction was not
watched.
・Details of measurements have been
described to HBM caracteristic data after an
electrical discharge
of the attached sheet.
(The document number refers to page 6.)
Pin
name
Common
terminal
VDD
VSS
IO-
IO
VDD
VSS
IO-IO
VDD
VSS
IO-
IO
VDD
VSS
IO-IO
Polarity
+-
+-<
br>+-
+-
+-
+-
+-
+-
+-
+-
+-
+-
Fail sizeSample size
Test voltage<
br>1000V2000V4000V
030303
030303
030303030303
030303
030303
030303
030303030303
030303
030303
030303
4Test re
sult
XT
INHN
Q
XTN
500V
03
03
03
03
03
03
03
03
03
0303
03
②Current draw measurement result
after an electrical discharge
・An increase in
leakage current was seen in ±1000V、±2000V、±4000V.
・Details of measurements have been described
to HBM caracteristic data after an electrical
discharge
Fail sizeSample size
of the
attached sheet. (The document number refers to
page 6.)
Pin name
VDD
Common
terminal<
br>VDD
VSS
IO-IO
Polarity
+-
+-
+-
500V
03
03
03
Test voltage
10
00V2000V
3303
0333
0303
4000V
03
33
03
※①Pulse number test, ②Temperture
characteristic test, and ③High temperture soak
test
are executed as a result, and it is
confirmed whether the leakage increase phenomenon
is progress.
【HBM additon result】
①Pulse
number test
・The current draw value by pulse
number is indicated as follows.
・After that,
it is a saturated condition though an increase in
leakage was seen three times.
・Because the
great increase is not seen, it can be said that it
will not be progress.
Pulse
number
1
3
5
7
10
Idd(A)
#97
7.30E-08
2.05E-07
1.89E-07
1.74E-07
1.42E-07
#9
8
9.91E-11
5.45E-07
4.01E-07
3.75E-07<
br>3.44E-07
#99
1.12E-10
3.79E-07
6.96
E-07
6.78E-07
7.02E-07
②Temperature
characteristic test
・The current draw value by
85℃ in measurement temperature is indicated as
follows.
・A decrease in leakage was seen.
Temp
85℃
Idd(A)
#97#98#99
7.71E-082.05
E-074.63E-07
③High temperature soak
test
・The current draw value after the high
temperature soak of 150℃ is indicated as follows.
・A decrease in leakage was seen.
Temp
1
50℃
Idd(A)
#97#98#99
2.88E-083.84E-081.28
E-07
※It is thought a leakage increase that
accompanies a substrate leakage increase by the
career trap etc. from the result of ①~③. It
is no problem even if it excludes it from
a
defective judgment in the place where Leake is in
the standard.
OKI Engineering Co.,
Ltd
CONFIDENTIAL
09OEG32026 68
【MM
test result】
①IV measurement result after an
electrical discharge
・The abnormal value
regarded as destruction was not
watched.
・Details of measurements have been
described to MM caracteristic data after an
electrical discharge
of the attached sheet.
(The document number refers to page 6.)
Pin
name
Common
terminal
VDD
VSS
IO-
IO
VDD
VSS
IO-IO
VDD
VSS
IO-
IO
VDD
VSS
IO-IO
Polarity
+-
+-<
br>+-
+-
+-
+-
+-
+-
+-
+-
+-
+-
Fail sizeSample size
Test voltage<
br>100V200V400V
030303
030303
030303
0
30303
030303
030303
030303
030303
0
30303
030303
030303
Pulse number
test
1.00E-06
030303
Test result
XT
INHN
Q
XTN
9.00E-07
8.00E-07
②Curr
ent draw measurement result after an electrical
discharge
7.00E-07
6.00E-07
・An increase
in leakage was not seen in MM.
5.00E-07
・Details of measurements have been
described to MM caracteristic data after an
electrical discharge
4.00E-07
of the
attached sheet. (The document number refers to
page 6.)
3.00E-07
2.00E-07
Fail
sizeSample size
Test
voltage
1.00E-07
Common
0.00E+00
Pin n
amePolarity
terminal
50V100V200V400V
1112
Pulse number
VDD+-03030303
50V
03
03
03
03
03
03
03
03
03
03
03
03
#97
#98
#99
VDDVSS
IO-
IO
+-
+-
03
03
03
03
I
dd
(
A
)
03
03
03
03
【FI-
CDM test result】
①IV measurement result after
an electrical discharge
・The abnormal value
regarded as destruction was not
watched.
・Details of measurements have been
described to FICDM caracteristic data after an
electrical discharge
of the attached sheet.
(The document number refers to page 6.)
Fail
sizeSample size
Pin namePolarity
XT
INHN<
br>Q
XTN
+
-
+
-
+
-
+
-
Test voltage
125V
03
03
03
03<
br>03
03
03
03
250V
03
03
03<
br>03
03
03
03
03
500V
03
03<
br>03
03
03
03
03
03
750V
03<
br>03
03
03
03
03
03
03
1000V
03
03
03
03
03
03
03
03②Current draw measurement result after an
electrical discharge
・An increase in leakage
was seen in -1000V.
・Details of measurements
have been described to FICDM caracteristic
data after an electrical discharge
of the
attached sheet. (The document number refers to
page 6.)
Pin
namePolarity
VDD
+
-
Fail sizeSample
size
Test voltage
250V500V750V1000V
03030
303
03030313
125V
03
03
※The
opinion of this result similar to the HBM addition
measurement result can be made.
OKI
Engineering Co.,
Ltd
CONFIDENTIAL
09OEG32026
78
5Test period
・May13 ,2009 ~ May21
,2009
・HBMMM test
・FI-CDM test
・IV measu
rement
:
:
:
6
Test
equipment
:
・Temperature characteristic test:
・Higjh
temperature soak test:
ESDLATCH-UP TEST SYSTEM
MODEL7000
TOKYO ELECTRONICS
CO.,LTD
HED-C5002 Hanwa Electronics Ind.
Co.,LTD
4145 SEMICONDUCTOR PARAMETER
ANALIZER
D
16058A TEST FIXTURE D
T-2420
THEROMICS
PH-301 ESPEC
【HBM test】
7Sample
NoMethods
1
2
3
Common
terminal
VDD
VSS
IO-IO
Polarity
+-
+-
+-<
br>1
13
25
Sample No
500V
2
1426
1000V2000V
6
18
30
7
19
31
8
20
32
9
21
33
10
2234
4000V
11
23
35
12
24
36<
br>3
15
27
4
16
28
5
17
29
【MM test】
Methods
1
2
3
Common<
br>terminal
VDD
VSS
IO-IO
Polarity
+-
+-
+-
37
49
61
Sample No
5
0V
38
50
62
100V200V
42
54
66
43
55
67
44
56
68
45
5769
46
58
70
400V
47
59
7148
60
72
39
51
63
40
52
64
41
53
65
【FI-CDM test】
MethodsPo
larity
1
2
+
-
125V
12
3
4
5
6
250V
12
3
45
6
Sample No<
br>500V
789
101112
750V
131415
1617
18
1000V
192021
222324
※The same
sample was used about +-125voltage and
+-250voltage.
【HBM addition
mesurement】
Test name
Pulse number
test
Temperature characteristic test
High
temperature soak test
Sample No
97
97
97
98
98
98
99
99
99
※The
same sample was used.
8Test pin table
【HBMMM
】
PinNo
1
2
3
4
5
6
7
8
Pin name
IO
Test pin
HBMMM
●●
●
●
●●
●●
--
●●
--
●●
INHN
X
T
XTN
VSS
-
Q
-
VDD
I
I
I
GND
-
O
-
5.5V
【FI-
CDM】
PinNo
1
2
3
4
5
6
Pin
name
IO
Test pin
FI-CDM
●
●
●
●
●
●
VDD
Q
VSS
INHN
XT
X
TN
5.5V
O
GND
I
I
I
OKI
Engineering Co.,
Ltd
CONFIDENTIAL
09OEG32026
88
【HBMMM】
9PinLayout
【FI-CDM】
〈Bottom
View〉
〈TopView〉
10
Various
documents
Document contents
Initial
caracteristic data
File
name
【DIP8pin】Initial measurement
data
【CDM】Initial measurement
data
【HBM】measurement data
【MM】measurement
data
【FICDM】measurement data
Report No
09
OEG32026(1)
09OEG32026(2)
09OEG32026(3)
0
9OEG32026(4)
09OEG32026(5)
HBM caracteristic
data
after an electrical discharge.
MM
caracteristic data
after an electrical
discharge.
FI-CDM caracteristic data
after
an electrical discharge.
OKI Engineering Co.,
Ltd
CONFIDENTIAL